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Plasma Etching System

/Plasma Etching System
  • plasma processing system

HS Magnetics’ plasma processing system capable of photoresist ashing using oxygen plasma. The Plasma Etching System is a plasma processing system capable of photoresist ashing using oxygen plasma. The system will accommodate up to 8″ substrates or a variety of smaller substrate sizes and shapes. The system is designed to provide a wide range of plasma operating conditions and is ideally suited for research, process development or low volume production. The system is designed with many standard features not found on other systems in its price range.

Features:

Bench-type modular chamber (20″ x 20″ x 16″ H). The whole system can sit on top of a standard office table, without consuming large space. Front door swing open mechanism, easy load or unload sample.
Horizontal parallel plate configuration for planar processing. Electrodes are manufactured with 304 stainless steel. The use of 304 SS provides maximum lifetime of the electrode and minimizes water leaks and electrolysis of the electrode water channels. A small peripheral raised edge on the lower electrode prevents substrates from sliding off and shorting the electrode to ground.
Chamber is manufactured from quality aluminum solid.
Process chamber incorporates a wide-angle viewport allowing the user to view the entire process area. Small windows often limit user’s capability to visually determine the plasma processing conditions. 660LB 300KG Permanent Magnet Magnetic Lifting Crane
The power supply can be easily decoupled from the system.
The one gas channel for processing gas (O2, 0-100 sccm, pre-calibrated).
The gas delivery system tot he process chamber is accomplished via an easily replaceable gas showerhead located on the upper electrode. By tailoring the hole size and placement on the showerhead, the system can deliver the maximum process uniformity for any plasma requirement.
The system is supplied with a direct drive, rotary vane, 32.5CFM, corrosive series, mechanical pump. Pump package includes a full charge of inert pump fluid and all necessary vacuum hosing and fittings for complete installation.
An embedded microprocess and display screen are provided for complete automation of the system. Up to 10-recipe storage is provided with multilevel process steps. The system provides display of all operating parameters and can be easily controlled by the user.

Applications:

Asbestos sample preparation
Microincineration of organic material
Etching of organic samples for SEM & TEM work
Removal of photoresist and electronic component encapsulations
Surface treatment of plastics
Cleaning of SEM/TEM sample holders

Utility requirements:

Power: 110 V, 60 Hz, 15 Amps / 220 V, 50 Hz, 7 Amps
Pump: 110 V, 60 Hz, 10 Amps
Water: for electrode cooling
Air: pressurized air for valve operation
N2: for chamber ventilation
Gas: process gas (O2)

More
  • Customized is Available
  • Affordable price
  • Quality guaranteed
  • T/T or L/C accepted
  • Other payment accepted
  • Fast shipping, Worldwide delivery
  • 24-Hours excellent customer service
  • Offer free magnetic solution
  • Bulk discounts for larger orders

Product Range

Imperial

1. DXG75 Door Gaske Extruder                                    1 Set

Parts

Main items

Model

Explanation

Screw and barrel

Screw diameter

Φ75mm

Zhoushan, Zhejiang
Material
38CrMoALA,
deeply nitrading processing

Screw valid length

2100mm

Screw length/ diameter (L/D)

28:1

Screw number

1

Barrel heating power

15KW

Barrel wind-cooling power

180W ×5

Die   power

Nitriding depth

0.40-0.70mm

Nitriding rigidity (HV)

890-980

surface roughness (mm)

Ra0.8-Ra1.6

Linearity

≤0.015

Output

40-80kg/h

Heating type and material

Electric

Heating by Aluminum ring

Reduction driver

Reduction gear

Hard teeth

QingDao, China

Main motor

Power

22KW

Special using frequency converter

Main machine

Feeding type

Automatic feeding

Center height 1000mm
(match with mould)

Drier

50kg

hydraulic pressure screen-changing machine

38CrMoAL

Contact type of Die and mould

Contact by bolts in the type of flange

Total power

≈40KW

2.Main Electrical Elements

Item

Brand

Number

Origin

Frequency converter  

Fuji

1

Japan

 Digital frequency meter

2

Qingdao China

Contactor

SIEMENS

13

Germany

Temperature controller

OMRON

8

Japan

Current meter

CHINT

6

Zhejiang China

Volt meter

CHINT

1

Zhejiang China

overload circuit breaker

CHINT

1

Zhejiang China

3. Die And Mould                                                 1 Set

Material: 2Cr13

4. Cooling Flume                                                  2 Sets

Material

Stainless steel

Cooling form

Spraying cooling, number of spraying mouth:20/set×3sets=60

Length

4m/set ×2 sets=8m

Water supply form

Automatic recycling water supply

Chilling plant (1 set)

Air or water compressor ,designed by customer’s requirement

5. Flat-Band Traction Machine                             1 Set

Special-use frequency converter

Power: 1.5KW

Frequency converter (Fuji, Japan)

Power: 1.5KW

Time delayer cutoff machine

6. Automatic 45-Degree Cutting Machine (PLC Control System)         1 Set

Motor

AIRTAC

Gas move

AIRTAC

Blades

import material

Servo system

OMRON

Control tank

touch screen style

Cutting mold 1 set

2Cr13

7. Auxiliary Puncher/Holes Drilling Machine                          1 Set

8. Mechanical Hands                                             1 Set

photoelectrical switch Made in Taiwan
Motor China top brand
pneumatic component Made in Taiwan

9. Refrigerator Door Gasket Welding Machine                         1 Set

1) Main Parameter

No.

Item

Value

1

External Dimension

1840×1300×1220mm

2

Transverse Mold Space

50mm

3

Longitudinal Mold Space

98mm

4

Total System Power

2.11KW

5

Electrothermal Power

1.95KW

6

Working Efficiency

500-600 sets/shift

2) Details of Electrical Components

No.

Item

Description

Qty

Remark

1

Programmer

1

OMRON

2

Time Relay

SJ1/SJ2/SJ3

3

OMRON

3

Photoelectric Switch

1

UTRCK

4

Middle Relay

KM1

1

OMRON

5

Relay Base

1

OMRON

6

Contactor

KM2

1

Schneider

7

Contactor

KM3

1

Schneider

8

Air Switch

Total power supply

1

Schneider

9

Electromagnetic Valve

8

AIRTAC

10

Electromagnetic Valve

1

AIRTAC

11

Solenoid Coil

9

AIRTAC

12

Gas Passage Board

1

AIRTAC

The puncher, automatic 45 degree cutting machine and mechanical is designed as an integration and controlled by a set of PLC control system. Which  has the feature of convenient operation, precise cutting, and stable performance.

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